NanoPULS™ Particle Counter for UPW

Designed to Monitor Ultrapure Water Quality Online

Ecolab® Ultra-Pure Water+ NanoParticle ULtrasound Sensor, known as NanoPULS is an advanced liquid particle counter for semiconductor-grade Ultrapure water, based on high-intensity ultrasound technology.

It is designed to monitor UPW quality online, in semiconductor manufacturing, where tiny particles (typically less than 10 nm, so-called “killer size”) can cause defects in wafers and reduce production yield. Detecting these nanoparticles in UPW before they reach the manufacturing tools and wafers is crucial for overall semiconductor production.

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How It Works

Ecolab Ultra-Pure Water+ NanoPULS consists of a Transmitter Unit (TU) that controls the measurement and a Sensor Unit (SU) for sampling UPW and detecting nanoparticles.

It operates based on acoustic cavitation generated by a high-intensity ultrasound transducer. The transducer sends focused ultrasound pulses into the UPW flowing through the sampling cell, creating cavitation on nanoparticles passing through the focus. This nanoparticle detection method ensures a high signal-to-noise ratio, regardless of particle size.

To measure different particle sizes, multiple SUs (up to 4) can be used. Alternatively, they can be used at the same size channel but with different sampling lines, which is useful for profiling a UPW system. This solution is equivalent to having multiple particle counters.

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Equipment Information

Features and Benefits

Unlike common techniques, Ecolab Ultra-Pure Water+ NanoPULS employs an ultrasound detection method that ensures a high signal-to-noise ratio even for sub-10nm particles.

It includes multiple sensors (flow, pressure, temperature, leak) and a robust monitoring system to ensure stable measurements, notify users of deviations, and automatically stop measurements, when necessary, as a protection against failure.

Its large touch-screen interface offers an intuitive and comfortable user experience in terms of operation (start/stop, size channel and sample selection), data visualization and extraction, and troubleshooting.

Ecolab Ultra-Pure Water+ NanoPULS possesses a distinctive feature in its modularity, enabling the simultaneous measurement of size channels by connecting up to 4 sensors to a single Transmitter Unit.

Additional important features:

Automatic flow regulation
No need for external consumables or a laptop (stand-alone instrument)
Easy plug-and-play operation
Continuous 24/7 measurement
Data extraction options: USB-key, 4-20mA analog output, or network (RJ45)

Technical Information

Specifications	Value
Size Channels	≥ 5 nm, ≥ 10 nm, ≥ 20 nm or ≥ 50 nm
Counting Range	0 - 3,000 p/mL
Zero Count Level	100 p/L
Reporting Time	1 reading /minute
Flowrate	300 ML/min (automatic control)
Voltage	100 - 240 VAC / 50 - 60 Hz
Dimensions	TU: 250 x 307 x 430 mm (9 x 15 x 17 in) SU: 160 x 430 x 430 mm (6 x 17 x 17 in)
Weight	TU: 13 kg (29 lbs) SU: 13 kg (29 lbs)

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With unparalleled expertise and cutting-edge technology, we partner with customers to deliver world-class results and optimized operations. Contact us to learn how we can help you.

Ecolab Inc.
1 Ecolab Place
St. Paul, MN 55102

Ecolab Customer Service:
Phone: +1-800-352-5326

Nalco Water Customer Service
Phone: +1-800-288-0879

Ecolab Ultra-Pure Water+

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