- Size: Engineered
- Solid: 30%
- pH: 8.9-9.5
- Potassium stabilized
Chemical Mechanical Planarization Silica Sol Abrasives
Chemical mechanical planarization (CMP) removes material from the surface of a wafer to achieve a high-quality foundation for the next layer of a circuit or as a final polishing step. Our next-generation CMP silica sol abrasives are designed to enable targeted selectivity, low defectivity and scratch rate, fast removal rate and high stability in slurry formulation.
We offer a range of colloidal silica abrasives for CMP to cover different slurry needs for different chip types and layers. The abrasive particles have a size distribution, hardness, morphology and surface profile which directly affect critical metrics, including removal rate and wafer defects.
High Purity Colloidal Silica Products for CMP
NALCO 13184¹
NALCO DVSTS027¹
- Size (nm): 35
- Area m2/gm: 85
- % Solids: 30
- pH: 9-10
- Stabilizing: K+
NALCO DVSTS029¹
- Size (nm): Engineered
- Area m2/gm: 85
- % Solids: 50
- pH: 9-10
- Stabilizing: K+
NALCO 1000
- Size (nm): Engineered
- Area m2/gm: 50
- % Solids: 50
- pH: 8.5
Wide Range of Additional Products Available
Contact us for all of the available products
Customized CMP Abrasive Product Development
Our experienced dedicated RD&E teams provide customized silica sol product development to deliver solutions that are tailored to specific business needs and processes. We design products covering a wide range of:
- Particle Size
- Particle Size Distribution
- Stabilized Cation
- Concentration
- pH
- Package Type
- Temperature Condition
- Classification
Colloidal Silica Product Quality and Consistency
Colloidal Silica Product Quality and Consistency
Nalco Water focuses on quality, consistency, and reliability throughout all our colloidal silica solutions. To ensure that our silica sol performs correctly in CMP applications, we look to IPC standards to guide our quality control testing.
References
- Products were made using LMSII engineered approach to remove metals; [Cu] and [Ni] less than 20 ppb, Availability subject to the volume↵
Get In Touch with Us
Give Us a Call
With unparalleled expertise and cutting-edge technology, we partner with customers to deliver world-class results and optimized operations. Contact us to learn how we can help you.
Nalco Water
Colloidal Technologies Group
1601 W. Diehl Road
Naperville, Il 60563
For additional information or assistance, please contact our Colloidal Technologies Group.
Nalco Water Customer Service: +1-800-288-0879
Contact Our Colloidal Technologies Experts
Thank you for your inquiry about our colloidal technology solutions. Someone from our team will be in touch with you shortly.